Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Reexamination Certificate
2005-07-12
2005-07-12
Alejandro-Mulero, Luz (Department: 1763)
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of substrate or post-treatment of coated substrate
C427S569000, C438S062000, C438S484000, C438S490000
Reexamination Certificate
active
06916509
ABSTRACT:
With a conventional cylindrical can method, a region used as a film formation ground electrode is a portion of the cylindrical can, and an apparatus becomes larger in size in proportion to the surface area of the electrode. A conveyor device and a film formation apparatus having the conveyor device are provided, which have a unit for continuously conveying a flexible substrate from one end to the other end, and which are characterized in that a plurality of cylindrical rollers are provided between the one end and the other end along an arc with a radius R, the cylindrical rollers being arranged such that their center axes run parallel to each other, and that a mechanism for conveying the flexible substrate while the substrate is in contact with each of the plurality of cylindrical rollers is provided.
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Kusumoto Naoto
Shinohara Hisato
Yonezawa Masato
Alejandro-Mulero Luz
Fish & Richardson P.C.
Semiconductor Energy Laboratory Co,. Ltd.
TDK Corporation
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