Conveyor cassette for wafers

Details Conveyor cassette for wafers Conveyor cassette for wafers

1994-07-13

1995-09-26

Ackun, Jacob K.

Special receptacle or package

For plate or sheet

Fragile or sensitive

118500, 414936, 414940, B05C 1302

Patent

active

054528011

ABSTRACT:
A cassette (2) or storage box for integrated circuit wafers or memory disks arranged and constructed for directly being placed onto the driven rollers (6) of contaminant free conveyors. The cassettes have a flat canted surface (10) for riding on the rollers. The cant is enough such that the loaded wafers lean against the sides of their individual pockets as the cassette travels. The leaning reduces damaged to the wafers by the vibrations involved with physically moving the cassette.

REFERENCES:
patent: 4311427 (1982-01-01), Coad et al.
patent: 4960298 (1990-10-01), Moroi
patent: 5348151 (1994-09-01), Dressen
patent: 5350069 (1994-09-01), Agwu

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