Conveyor arm apparatus with gap detection

Details Conveyor arm apparatus with gap detection Conveyor arm apparatus with gap detection

1987-01-27

1989-02-07

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

2502221, 250223R, 414331, G01N 2186, G01V 904

Patent

active

048033731

ABSTRACT:
A conveyor arm apparatus unloads one by one a plurality of wafers which are stored in a holding chamber such that a surface of one wafer faces a back surface of another wafer at a predetermined distance. Two beams parallel to a semiconductor wafer mounting surface of a conveyor arm are projected into the holding chamber and the two beams passing through a gap between adjacent wafers are detected. Thus, the relative position of the conveyor arm and the wafers in the holding chamber can be confirmed.

REFERENCES:
patent: 3502232 (1970-03-01), Hartman III
patent: 3566135 (1971-02-01), Mouchart
patent: 3612884 (1971-10-01), Linardos et al.
patent: 3672470 (1972-06-01), Ohntrup et al.
patent: 3681607 (1972-08-01), Hartman III
patent: 3902615 (1975-09-01), Levy et al.
patent: 3932763 (1976-01-01), Weinstein
patent: 4252250 (1981-02-01), Toth
patent: 4437660 (1984-03-01), Tompkins et al.

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