Conveyance system

Details Conveyance system Conveyance system

2005-03-08

2005-03-08

Keenan, James W. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S935000

Reexamination Certificate

active

06863485

ABSTRACT:
Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamber14is formed parallel to these wafer processing apparatus, and a guide rail11is provided inside the chamber14. A mobile element12driven by means of a linear motor is provided on the guide rail11, and a wafer transfer robot13capable of exchanging a wafer between the wafer processing apparatus is mounted on the mobile element12. With this structure, the wafer transfer robot13exchange wafers between wafer processing apparatus to perform each process on the wafers until the wafers are conveyed to the wafer processing apparatus Z.

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