Converter and method of manufacturing the same

Details Converter and method of manufacturing the same Converter and method of manufacturing the same

2005-09-13

2005-09-13

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

C257S202000, C438S048000

Reexamination Certificate

active

06941812

ABSTRACT:
A pressure sensor10included an upper substrate30having a detection face30A, a diaphragm20provided with a space from the detection substrate30and displaceable to and from the upper substrate30, fixed electrodes32, 33provided on the detection face30A of the upper substrate30, and a first signal fetching section22electrically connected to the diaphragm20, and the diaphragm20is formed by dry-etching single-crystal silicon with the specific resistance lowered to 1.0 Ω·cm or below by mixing dopant lowering the resistance value.

REFERENCES:
patent: 5900549 (1999-05-01), Moriya
patent: 2002/0121145 (2002-09-01), DeConde et al.
patent: 60-138434 (1985-07-01), None
patent: 04-133458 (1992-12-01), None
patent: 07-167725 (1995-07-01), None
patent: 08-094472 (1996-04-01), None
patent: 10270714 (1997-03-01), None
patent: 11-287724 (1999-10-01), None

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