Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
Patent
1997-05-06
1999-03-23
Padgett, Marianne
Coating processes
Direct application of electrical, magnetic, wave, or...
Ion plating or implantation
427525, 427527, 427533, C23C 1406, C23C 1412, C23C 1414, H05H 100
Patent
active
058856668
ABSTRACT:
This invention includes the discovery that poorly crystallized hexagonal-like films of boron nitride with sp.sup.2 bonding can be converted by ion implantation to amorphous, cubic-like, boron nitride with sp.sup.3 bonding. Preferably the sp.sup.2 bonded film has a considerable amount of residual stress. The discovery that sp.sup.2 bonded BN can be converted to sp.sup.3 bonded BN may prove to be a significant advancement in coating technology for the electronics, machine tool, biomedical, and automotive industries. This discovery is important in that growth processes compatible with high volume production can be used to grow sp.sup.2 bonded BN (e.g., sputtering, e-beam evaporation, and CVD), then implantation procedures can be used to subsequently change the film to sp.sup.3 bonding. The amorphous, cubic-like, BN films can be grown on silicon wafers. This technique is also well-suited for metallic and plastic substrates because both the deposition and implantation processes occur at low temperatures. Coatings applied to metallic substrates such as carbonized steels and aluminum alloys must be processed at temperatures typically less than 150 C.
REFERENCES:
patent: 4194930 (1980-03-01), Tanaka et al.
patent: 4415420 (1983-11-01), Beale
patent: 4656052 (1987-04-01), Satou et al.
patent: 4657774 (1987-04-01), Satou et al.
patent: 4683043 (1987-07-01), Melton et al.
patent: 4683149 (1987-07-01), Suzuki et al.
patent: 4762729 (1988-08-01), Hirano et al.
patent: 5075130 (1991-12-01), Reeber et al.
patent: 5096740 (1992-03-01), Nakagama et al.
patent: 5296119 (1994-03-01), Moustakas
patent: 5398639 (1995-03-01), Doll et al.
patent: 5518780 (1996-05-01), Tamor et al.
patent: 5535905 (1996-07-01), Harris et al.
patent: 5597625 (1997-01-01), Ong et al.
patent: 5723188 (1998-03-01), Luthje et al.
Vel et al, "Cubic boron nitride: synthesis, physicochemical properties and applications," Mat. Sci. & Eng., B10 (1991) 149-164 No Month.
Jimenez et al, "Near-edge x-ray absorption fine structure study of bonding modifications in BN thin films by ion implantation," Appl. Phys. Lett. 68 (20), 13 May 1996.
Doll Gary Lynn
Mantese Joseph Vito
Brooks Cary W.
General Motors Corporation
Padgett Marianne
LandOfFree
Conversion of hexagonal-like BN to cubic-like BN by ion implanta does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Conversion of hexagonal-like BN to cubic-like BN by ion implanta, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Conversion of hexagonal-like BN to cubic-like BN by ion implanta will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2122970