Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate
2005-04-26
2005-04-26
Wells, Nikita (Department: 2881)
Radiant energy
Means to align or position an object relative to a source or...
C250S492200, C250S492220, C250S310000, C250S397000, C250S398000
Reexamination Certificate
active
06885012
ABSTRACT:
A convergent charged particle beam apparatus includes an electron beam system which emits a converged electron beam, a vacuum chamber which is connected to the electron beam system, and a stage which mounts a specimen and moves at least in one direction inside of the vacuum chamber. An electron beam image observation unit observes an electron beam image of a surface of the specimen. A height detector optically detects a height of the specimen mounted on the stage by illuminating the surface of said specimen with light and by detecting reflected light of the illumination reflected from the surface of the specimen, and a controller controls a focus position of the electron beam in accordance with an output from the height detector while the stage is moving at least in one direction.
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Hiroi Takashi
Ninomiya Taku
Shinada Hiroyuki
Tanaka Maki
Watanabe Masahiro
Antonelli Terry Stout & Kraus LLP
Hitachi , Ltd.
Wells Nikita
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