Convection-shielded cryopump

Details Convection-shielded cryopump Convection-shielded cryopump

1996-12-19

1998-03-17

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

417901, B01D 800

Patent

active

057273928

ABSTRACT:
A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamber and surrounds the cryopanel to minimize the convective flow of gas past the cryopanel.

REFERENCES:
patent: 3103108 (1963-09-01), Santeler
patent: 3122896 (1964-03-01), Hickey
patent: 3321927 (1967-05-01), Hood
patent: 4577465 (1986-03-01), Olsen et al.
patent: 4815303 (1989-03-01), Duza
patent: 5156007 (1992-10-01), Bartlett et al.
patent: 5465584 (1995-11-01), Mattern-Klosson et al.
patent: 5537833 (1996-07-01), Matte et al.

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