Controls for semiconductor wafer orientor

Details Controls for semiconductor wafer orientor Controls for semiconductor wafer orientor

1980-08-08

1986-10-21

Valenza, Joseph E.

Conveyors: fluid current

With means to control conveying fluid or movement of load in...

Control of conveying fluid

406 84, 406 87, 198394, B65G 5103, B65G 4724

Patent

active

046182926

ABSTRACT:
This specification deals with electro-optic controls for stopping and orienting of a semiconductor wafer being transported along a track on an air film. At one or more locations along the track the characteristics of the air film are changed by electronic controls responding to optical pickups sensing the position and orientation of a semiconductor wafer entering the particular location on the air film to first stop the wafer in the general proximity of the location, then center the wafer in the location and after the wafer is centered, quickly rotate the wafer until it assumes the desired orientation. All this is done without edge contact of the wafer by any solid objects.

REFERENCES:
patent: 3603646 (1971-09-01), Leoff
patent: 3930684 (1976-01-01), Lasch et al.
patent: 4024944 (1977-05-01), Adams et al.
"Wafer Chuck Air Flow", IBM Technical Disclosure Bulletin, vol. 18, No. 6, 11'75, pp. 1865 & 1866, Gruber & Musits.
IBM Technical Disclosure Bulletin, vol, 20, No. 2, 7/1977, pp. 595-598, "Automatic Edge Location for Pneumatic Orientor", Gardineer et al.

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