Controlling the properties of native films using selective growt

Details Controlling the properties of native films using selective growt Controlling the properties of native films using selective growt

1979-02-14

1981-01-20

Smith, John D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

204164, 204192S, 427 82, 427 85, 427 87, 427 93, 156643, H01L 2130, H01L 21324, H01L 21316

Patent

active

042462967

ABSTRACT:
An improved technique for growing native films on compound semiconductors is disclosed. In this technique, additional preferential chemistry is used in conjunction with prior art growth processes to eliminate what would otherwise be unreacted constituents in the native film. Films grown using this technique display improved electrical properties.

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