Controlling groove dimensions for enhanced slurry flow

Details Controlling groove dimensions for enhanced slurry flow Controlling groove dimensions for enhanced slurry flow

1997-09-23

1999-03-30

Scherbel, David A.

Abrading

Abrading process

Glass or stone abrading

451527, 451534, B24B 100

Patent

active

058881212

ABSTRACT:
A polishing pad surface designed for chemical mechanical polishing of substrates is described. The polishing pad includes a first area of the surface having formed thereon a first set of grooves and a second area of the surface having formed thereon a second set of grooves, wherein the first set of grooves have a larger cross-sectional area than the second set of grooves.

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patent: 5690540 (1997-11-01), Elliott et al.
patent: 5778481 (1998-07-01), Amsden et al.

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