Controlled sulfur species deposition process

Details Controlled sulfur species deposition process Controlled sulfur species deposition process

2004-01-29

2010-10-12

Cleveland, Michael (Department: 1712)

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

C427S064000

Reexamination Certificate

active

07811634

ABSTRACT:
The present invention is a method for the deposition of a thin film of a pre-determined composition onto a substrate, the thin film comprising ternary, quaternary or higher sulfide compounds selected from the group consisting of thioaluminates, thiogallates and thioindates of at least one element from Groups IIA and IIB of the Periodic Table. The method comprises volatizing at least one source material of a sulfide of a pre-determined composition to form a sulfur-bearing thin film composition on a substrate and simultaneously inhibiting any excess quantity of sulfur-bearing species volatilized from the at least one source material from impinging on the substrate. The method improves the luminance and emission spectrum of phosphor materials used for full color ac electroluminescent displays employing thick film dielectric layers with a high dielectric constant.

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