Electric lamp and discharge devices – Electrode and shield structures – Cathodes containing and/or coated with electron emissive...
Patent
1981-02-06
1983-04-12
Chatmon, Jr., Saxfield
Electric lamp and discharge devices
Electrode and shield structures
Cathodes containing and/or coated with electron emissive...
313337, 313346DC, 427 77, 428596, H01J 114, H01J 1906, H01K 104
Patent
active
043799795
ABSTRACT:
A controlled porosity sheet defining a surface for a thermionic dispenser thode and a method of manufacture. Starting with a generally flat silicon template substrate structure having an array of upstanding microposts 1-25 microns across on 5-100 micron spacings from each other, a layer of metal is deposited on the substrate to surround the microposts and cover the substrate structure to a desired depth. The metal layer is then abraded to a smooth, flat surface which exposes the microposts. Thereafter, the silicon substrate and microposts are completely etched away, leaving a metal sheet having micron-size holes therethrough.
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Greene Richard F.
Thomas Richard E.
Beers Robert F.
Chatmon, Jr. Saxfield
Ellis William T.
The United States of America as represented by the Secretary of
Walden Kenneth E.
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