Controlled-immersion inspection

Details Controlled-immersion inspection Controlled-immersion inspection

1995-08-16

1997-02-04

Chapman, John E.

Measuring and testing

Vibration

By mechanical waves

G01N 2926

Patent

active

056000685

ABSTRACT:
A controlled-immersion inspection mechanism gradually immerses a planar pattern of integrated circuits or other articles into a tank filled with water to a given level; across the tank there are two spaced parallel guide tracks along which two carriages, connected by a platform, move from an entry position above the water to an inspection position. In the inspection position the platform supports the articles, in an orderly array, for scanning inspection by a focussed energy beam, preferably an ultrasonic beam. A platform drive drives the platform between its entry and inspection positions. A mesh or other removable cover that permits water to flow but stabilizes article positions may cover the articles during immersion; the mesh is usually removed before scanning.

REFERENCES:
patent: 5359895 (1994-11-01), Isenberg et al.

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