Metal treatment – Process of modifying or maintaining internal physical... – Heating or cooling of solid metal
Reexamination Certificate
2007-05-17
2010-06-22
King, Roy (Department: 1793)
Metal treatment
Process of modifying or maintaining internal physical...
Heating or cooling of solid metal
Reexamination Certificate
active
07740723
ABSTRACT:
A precious metal sputter target has a composition selected from the group consisting of platinum, palladium, rhodium, iridium, ruthenium, osmium and single-phase alloys thereof. The sputter target's grain structure is at least about 99 percent recrystallized and has a grain size of less than about 200 μm for improving sputter uniformity. The cryogenic method for producing these sputter targets is also effective for improving sputter performance for silver an gold sputter targets.
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Gilman Paul S.
Mathew Binu
Perry Andrew C.
Stuber Wendell
King Roy
Praxair S.T. Technology, Inc
Schwartz Iurie A.
Yang Jie
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