Controlled-grain-precious metal sputter targets

Details Controlled-grain-precious metal sputter targets Controlled-grain-precious metal sputter targets

2007-06-26

2007-06-26

King, Roy (Department: 1742)

Metal treatment

Stock

Noble metal base

C420S466000

Reexamination Certificate

active

10214671

ABSTRACT:
A precious metal sputter target has a composition selected from the group consisting of platinum, palladium, rhodium, iridium, ruthenium, osmium and single-phase alloys thereof. The sputter target's grain structure is at least about 99 percent recrystallized and has a grain size of less than about 200 μm for improving sputter uniformity. The cryogenic method for producing these sputter targets is also effective for improving sputter performance for silver and gold sputter targets.

REFERENCES:
patent: 4083220 (1978-04-01), Kobayashi et al.
patent: 4159217 (1979-06-01), Selines et al.
patent: 5600989 (1997-02-01), Segal et al.
patent: 5766380 (1998-06-01), Lo et al.
patent: 5993575 (1999-11-01), Lo et al.
patent: 5993621 (1999-11-01), Liu
patent: 6139701 (2000-10-01), Pavate et al.
patent: 6197129 (2001-03-01), Zhu et al.
patent: 6238494 (2001-05-01), Segal
patent: 6723187 (2004-04-01), Segal et al.
patent: 2001/0023726 (2001-09-01), Koenigsmann et al.
patent: 799905 (1997-10-01), None
patent: 3115562 (1991-05-01), None
patent: 0015663 (2000-03-01), None
Rigney et al., “Deformation Substructures Associated with Very Large Plastic Strains”, Scripta Metallurgica, vol. 27 (1992) pp. 975-980.
Valiev et al., “Structure and Mechanical Behvior of Ultrafine-Grained Metals and Alloys Subjected to Intense Plastic Deformation”, Physics of Metals and Metallography, vol. 85, No. 3 (1998) pp. 367-377.
Nakashima et al., “Influence of Channel Angle on the Development of Ultrafine Grains in Equal-Channel Angular Pressing”, Acta Metallurgica, vol. 46, No. 5 (1998) pp. 1589-1599.
Shin et al., “Grain Refinement of a Commercial 0.15%C Steel by Equal-Channel Angular Pressing”, Scripta Metallurgica, vol. 41, No. 3 (1999) pp. 259-262.
Tsuji et al., “Ultra-Fine Grained Bulk Steel Produced by Accumulative Roll-Bonding (ARB) Process”, Scripta Metallurgica, vol. 40, No. 7 (1999) pp. 795-800.
Sun et al., “Characteristics of Submicron Grained Structure Formed In Aluminum by Equal Channel Angular Extrusion”, Materials Science and Engineering (2000) pp. 82-85.

Affiliated with

Also associated with

Rating

Controlled-grain-precious metal sputter targets does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Controlled-grain-precious metal sputter targets, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Controlled-grain-precious metal sputter targets will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3816745