Controlled furnace heat treatment

Electric heating – Heating devices – With power supply and voltage or current regulation or...

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Details

21912143, 219491, 219508, 432 34, H05B 102

Patent

active

048209074

ABSTRACT:
The present invention is directed to a heat treatment apparatus for performing heat treatment of a substrate. According to the present invention, a thermocouple is introduced into a heating furnace and discharged from the heating furnace by carrier means in such a state that one side ends of the wires forming thermocouple are connected to the substrate and another ends of the wires forming the thermocouple are connected to fixed terminals of a terminal mount. Movable terminals of a terminal driving mechanism are brought into contact with the fixed terminals of the terminal mount, to outwardly extract output signals of the thermocouple. Thus, temperatures of the temperature measuring substrate can be accurately measured while securing air-tightness in the heating furnace. Further, entanglement of metal wires forming the thermocouple is prevented in introduction/discharging of the substrate.

REFERENCES:
patent: 2969471 (1961-01-01), Schneider
patent: 3883715 (1975-05-01), Gebo
patent: 4586006 (1986-04-01), Emmons
patent: 4593258 (1986-06-01), Block
patent: 4684783 (1987-08-01), Gore

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