Controlled feeding Czochralski apparatus

Details Controlled feeding Czochralski apparatus Controlled feeding Czochralski apparatus

1995-11-13

1996-12-24

Nguyen, Nam

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117208, 117217, C30B 3500

Patent

active

055870163

ABSTRACT:
A source (1) is equipped with a conveying device (4) for discharging the particles (2, 2a) at adjustable rates per unit time. A crystal (16), formed from doped particles, is withdrawn from the melting crucible (13) at a predetermined rate per unit time. So that the control process can be conducted smoothly over prolonged periods of time with precise doping, the particles (2, 2a) are fed single file to the melting crucible (13) and counted by at least one sensor (21, 22). The sequence of count pulses is sent to a counter (25) and compared there with a corresponding sequence of reference input pulses. The comparison signal formed from the count pulses and the reference input pulses is used, in accordance with its sign, as a control signal for adjusting the amount of particles being discharged per unit time from source (1) to correspond to the reference value.

REFERENCES:
patent: 3998686 (1976-12-01), Meiling et al.
patent: 4036595 (1977-07-01), Lorenzini et al.
patent: 4547258 (1985-10-01), Witter et al.
patent: 4968380 (1990-11-01), Freedman et al.
patent: 5229082 (1993-07-01), Seidensticker et al.
patent: 5324488 (1994-06-01), Klingshirn et al.

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