Valves and valve actuation – Fluid actuated or retarded – Fluid link or column actuator
Reexamination Certificate
2006-05-30
2006-05-30
Look, Edward K. (Department: 3751)
Valves and valve actuation
Fluid actuated or retarded
Fluid link or column actuator
C215S325000, C215S331000
Reexamination Certificate
active
07051991
ABSTRACT:
An actuator operated by a solenoid and a force amplifying means utilizing hydraulic pressure are used in combination with a diaphragm, to thereby provide a diaphragm valve made of Teflon™, and which is compact in size, has low power consumption, and which is capable of exerting a large force. The force amplifying means mainly comprises a cylinder including cylinder portions having different cross-sectional areas and oil filled in the cylinder. A force amplification ratio is equal to a ratio between the cross-sectional areas of the cylinder portions. A plunger which receives a biasing force of a spring is provided on an upper side of the force amplifying means. The plunger is operated by a solenoid, and a driving force of the plunger is amplified by the force amplifying means and transmitted to the diaphragm, thus adjusting a degree of valve opening. A flow rate control valve of the present invention is free from the problems of conventional control valves, and used for controlling a flow rate of a fluid, such as a chemical liquid or an exceptionally high-purity liquid.
REFERENCES:
patent: 3558099 (1971-01-01), Giorgi et al.
patent: 5758862 (1998-06-01), Sturman
patent: 5772181 (1998-06-01), Robertson, III
patent: 6062532 (2000-05-01), Gurich et al.
patent: 6213414 (2001-04-01), Stier et al.
Fristoe Jr. John K.
Look Edward K.
MKS Japan Inc.
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