Control system, lithographic apparatus, device manufacturing...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

Reexamination Certificate

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C355S053000, C355S075000

Reexamination Certificate

active

07061587

ABSTRACT:
A control system for a positioning device includes a controller connected in a feedback loop. The controller calculates a current for supply to the positioning device according to the error between a desired current value and a measured current value. This current is converted to a voltage by an amplifier and further modified by a feedforward voltage calculated using mechanical and electrical characteristics of the positioning device and a desired position and/or desired derivatives of position.

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Korean Office Action issued in Korean Application No. 10-2004-0032958 dated Oct. 31, 2005.

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