Control system for semiconductor circuit testing system

Details Control system for semiconductor circuit testing system Control system for semiconductor circuit testing system

1992-05-18

1995-02-28

Voeltz, Emanuel T.

Boots, shoes, and leggings

364552, 371 291, G06F 1520

Patent

active

053943481

ABSTRACT:
A semiconductor circuit testing system includes a semiconductor testing device, a probing device, and controls. The controls are connected to the semiconductor testing device and the probing device in order to automate a yield control of a semiconductor wafer testing process. Measurement data relative to semiconductor wafer is collected when the production number of wafers is less than a standard yield. When the output yield reaches a standard number the probing device is stopped.

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patent: 4875002 (1989-10-01), Sakamoto et al.
patent: 4937765 (1990-06-01), Shupe et al.
patent: 4965799 (1990-10-01), Green et al.
patent: 4967387 (1990-10-01), Shibasaki et al.

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