Geometrical instruments – Scriber – Graduating
Patent
1990-08-23
1991-10-22
Haroian, Harry N.
Geometrical instruments
Scriber
Graduating
33 2302, B43L 1324
Patent
active
050582810
ABSTRACT:
The grooved surface of an aberration-corrected holographic model grating is sensed by utilizing the sensing head of a scanning tunneling microscope. The sensing head is mechanically connected to a blazing type stylus for replicating the groove pattern of the holographic model on a ruled grating blank. A ruling engine causes the sensing head not only to scan the surface of the holographic grating model but also drive a blazing type ruling stylus or an equivalent type device in accordance with an error signal resulting from a departure of a sensing tip from the top of the holographic model groove as a function of tunneling current.
REFERENCES:
patent: 2527338 (1950-10-01), Stamm
patent: 3344526 (1967-10-01), Horsfield
patent: 4219933 (1980-01-01), Kita et al.
patent: 4690506 (1987-01-01), Kita et al.
Scientific American, Aug. 1985, "The Scanning Tunneling Microscope", G. Binnig et al., pp. 50-56.
J. Vac. Sci. Technology, May/Jun. 1986, "A Simplified Scanning Tunneling Microscope for Surface Science Studies", J. Demuth et al., pp. 1320-1323.
SPIE, vol. 815, 1987, "Observation of Grating Surfaces by the use of STM", T. Oshio et al., pp. 124-126.
Adams Harold W.
Haroian Harry N.
Kennedy Alan J.
Marchant R. Dennis
The United States of America as represented by the Administrator
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