Control system for automated parametric test equipment

Details Control system for automated parametric test equipment Control system for automated parametric test equipment

1990-08-21

1993-04-27

Nguyen, Vinh

Electricity: measuring and testing

Plural, automatically sequential tests

324158R, 371 151, 371 221, G01R 3128, G06F 1122

Patent

active

052065820

ABSTRACT:
Disclosed is a control system and methodology used for defining and executing parametric test sequences using automated test equipment. The control system is divided into components which separate fixed, reusable information from information which is specific to particular tests. One component contains reference data which describes the configuration of the wafer being tested as well as specifications for the tests to be carried out. Another component contains a set of measurement algorithms that describe individual tests to be performed on generic types of devices or parametric test structures. Execution of a test is carried out by a general test program which retrieves stored reference and test definition information and supplies it to the measurement algorithms to enable them to perform measurements on specific devices in the user specified sequence. The general test program additionally routes the measurement results obtained from the algorithms to data files and/or networks, and summarizes the results in a standardized report format.

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