Control system for a two chamber gas discharge laser

Details Control system for a two chamber gas discharge laser Control system for a two chamber gas discharge laser

2006-07-18

2006-07-18

Dinh, Trinh V. (Department: 2821)

Coherent light generators

Particular active media

Gas

Reexamination Certificate

active

07079564

ABSTRACT:
The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2injection controls with novel learning algorithm.

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