Control system for a sputtering system

Details Control system for a sputtering system Control system for a sputtering system

2006-02-07

2006-02-07

Schuberg, Darren (Department: 2834)

Electricity: single generator systems

Generator control

Combined diverse generator controls

C322S019000, C322S020000, C322S022000, C322S036000, C322S037000

Reexamination Certificate

active

06995545

ABSTRACT:
A fault handling algorithm processes a plurality of fault status signals from a sputtering system in a period of time to generate at least one command signal for affecting the operation of a power generator.

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