Control system for a charged particle beam apparatus

Details Control system for a charged particle beam apparatus Control system for a charged particle beam apparatus

1985-09-11

1987-08-04

Albritton, C. L.

Electric heating

Metal heating

By arc

219121EC, B23K 1500

Patent

active

046847820

ABSTRACT:
A feedback signal of a beam accelerating voltage, which is input into a feedback control system is fixed at a predetermined value corresponding to a signal under the condition before generation of arcing, when the arcing is generated, and thereafter, the fixed feedback signal is released to continue a feedback control.

REFERENCES:
patent: 3826889 (1974-07-01), Brukovsky et al.
patent: 3838313 (1974-09-01), Anderson
patent: 3884790 (1975-05-01), Kobayashi et al.
patent: 4238660 (1980-12-01), Bell, Jr. et al.

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