Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent
1997-11-17
2000-10-24
Grant, William
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
700 20, G06F 1900
Patent
active
061380547
ABSTRACT:
A semiconductor processing system, such as an ion implantation machine, includes a pair of controllers respectively disposed in high and low voltage areas of the machine, and interconnected by a fiber optic communication link. The controller located in the high voltage area employs a pair of computer processor units for respectively collecting the status of process parameters and control elements in the high voltage area, and for delivering control signals to controllable elements such as flow control valves. The controller in the low voltage area likewise employs a pair of computer processor units for generating control signals that are delivered via the fiber optic link to the first controller, and for receiving status signal information from the first controller. The fiber optic link provides high voltage isolation between the two controllers and reduces noise affecting signal accuracy.
REFERENCES:
patent: 4144550 (1979-03-01), Donohue et al.
patent: 4754200 (1988-06-01), Plumb et al.
patent: 5490134 (1996-02-01), Fernandes et al.
patent: 5999886 (2000-02-01), Martin et al.
patent: 6026088 (2000-02-01), Martin et al.
patent: 6030888 (2000-02-01), Leonardi
Grant William
Rapp Chad
Taiwan Semiconductor Manufacturing Company Ltd
LandOfFree
Control system employing fiber optic communication link for semi does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Control system employing fiber optic communication link for semi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Control system employing fiber optic communication link for semi will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1974564