Control of uniformity of growing alloy film

Details Control of uniformity of growing alloy film Control of uniformity of growing alloy film

1988-06-17

1990-06-19

Hoag, Willard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Condition of coated material

118 501, 118620, G05D 503, B05C 300

Patent

active

049343130

ABSTRACT:
Apparatus for the control of growth of epitaxial alloy films onto a substrate. A uniformity measurement probe scans the growing film and controls a corrector gun directing a corrector beam to the film. The probe and gun are correlated to determine the relevant characteristics of a point on the growing film and to apply a particular correction. Possible deposition alloys are cadmium, mercury and tellurium with the corrector beam being selected from one or more of these specie.

REFERENCES:
patent: 4159919 (1979-07-01), McFee
patent: 4311725 (1982-01-01), Holland
patent: 4525376 (1985-06-01), Edgerton
patent: 4624726 (1986-11-01), Gee et al.
patent: 4694777 (1987-09-01), Roche

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