Control of surface potential of insulating specimens in surface

Details Control of surface potential of insulating specimens in surface Control of surface potential of insulating specimens in surface

1997-11-12

1999-11-23

Anderson, Bruce C.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

250310, 250305, H05H 300, H01J 3726

Patent

active

059904763

ABSTRACT:
An apparatus effects a uniform surface potential on an insulating specimen in an x-ray photoelectron or a secondary ion emission instrument in which there is positive charging of an irradiation region. An area of the specimen including the irradiation region is flooded with a beam of low energy electrons to neutralize the positive charging, causing negative charging of the flooding area. Positive ions are directed onto the flooding area to neutralize the negative charging. The electron beam has an energy less than about 2 eV and an energy spread less than about 0.5 eV. The ratio of the beam distance to its diameter is less than about 10. The ions have an energy less than 10 eV.

REFERENCES:
patent: 4052614 (1977-10-01), Grunthaner et al.
patent: 4639301 (1987-01-01), Doherty et al.
patent: 4680467 (1987-07-01), Bryson et al.
patent: 4939360 (1990-07-01), Sakai
patent: 5034605 (1991-07-01), Bayly
patent: 5315113 (1994-05-01), Larson et al.
patent: 5432345 (1995-07-01), Kelly
patent: 5444242 (1995-08-01), Larson et al.
K. Wittmaack, "Primary-ion Charge Compensation in SIMS Analysis of Insulators", J. Appl. Phys. 50 (1) (Jan. 1979).
P. E. Larson and M. A. Kelly, "Surface Charge Neutralization of Insulating Samples in X-Ray Photoemission Spectroscopy", J. Vac. Sci. Technol. A 16 (6), 3483-3489 (Nov./Dec. 1998).

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