Coating processes – Electrical product produced – Metallic compound coating
Reexamination Certificate
2005-08-23
2005-08-23
Jones, Deborah (Department: 1775)
Coating processes
Electrical product produced
Metallic compound coating
C427S126100, C427S162000, C427S255360
Reexamination Certificate
active
06933004
ABSTRACT:
Materials such as titanium are vapor-deposited to form a film on a substrate while the substrate is thermally coupled to a temperature-controlling thermal source. Varying the temperature conditions of the substrate when the film is deposited varies the intrinsic stress of the film, which varies the change in substrate shape caused by the presence of the film. A film having a desired intrinsic stress may be obtained by control of the substrate temperature when the film is deposited. A stress-controlled titanium film may be used, for example, as an adhesion layer between a silicon movable structure in an optical MEMS device and a gold layer serving as a reflecting surface.
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Chan Ho Bun
Haueis Martin
Jones Deborah
Lucent Technologies - Inc.
Savage Jason
LandOfFree
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