Control of Si doping in GaAs, (Al,Ga)As and other compound semic

Details Control of Si doping in GaAs, (Al,Ga)As and other compound semic Control of Si doping in GaAs, (Al,Ga)As and other compound semic

1984-11-26

1985-10-29

Pianalto, Bernard D.

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

427 38, 427 85, 427 87, 427 93, 427250, 4272552, 427294, B05D 306

Patent

active

045500312

ABSTRACT:
A method of modulation doping GaAs, (Al,Ga)As and related compounds with silicon ions during molecular beam epitaxy (MBE) growth.

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