Control of regeneration of ammoniacal copper etchant

Details Control of regeneration of ammoniacal copper etchant Control of regeneration of ammoniacal copper etchant

1995-01-31

1996-06-11

Kunemund, Robert

Etching a substrate: processes

Nongaseous phase etching of substrate

Recycling, regenerating, or rejunevating etchant

1566421, C23F 146

Patent

active

055247806

ABSTRACT:
A method of improved control of recycle of ammoniacal copper etchant which uses metallic aluminum to remove copper without substantially adding undesirable byproducts. The very rapid reaction can be controlled by using a diluent of copper-free etchant, eliminating overheating. The separated copper and aluminum hydroxide sludge are easily filtered from the etchant. The purified etchant is now suitable for chemical adjustment and reuse.

REFERENCES:
patent: 3905827 (1975-09-01), Goffredo et al.
patent: 4058431 (1977-11-01), Haas
patent: 4082546 (1978-04-01), Wallace
patent: 4280887 (1981-07-01), Konstantouros
patent: 5472618 (1995-12-01), Bolser
Won, C. W. et al. Metall. Trans. B 24B(1) pp. 192-197.

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