Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate
2005-10-31
2009-06-23
Coleman, W. David (Department: 2823)
Semiconductor device manufacturing: process
Chemical etching
Liquid phase etching
C257SE21215
Reexamination Certificate
active
07550395
ABSTRACT:
A method for locally controlling an electrical potential of a semiconductor structure or device, and hence locally controlling lateral and/or vertical photoelectrochemical (PEC) etch rates, by appropriate placement of electrically resistive layers or layers that impede electron flow within the semiconductor structure, and/or by positioning a cathode in contact with specific layers of the semiconductor structure during PEC etching.
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Haberer Elaine D.
Hu Evelyn L.
Nakamura Shuji
Sharma Rajat
Coleman W. David
Gates & Cooper LLP
The Regents of the University of California
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