Fluid handling – Self-proportioning or correlating systems – Self-controlled branched flow systems
Reexamination Certificate
2006-03-03
2010-10-12
Hepperle, Stephen (Department: 3753)
Fluid handling
Self-proportioning or correlating systems
Self-controlled branched flow systems
C137S087020, C137S209000
Reexamination Certificate
active
07810516
ABSTRACT:
An improved bulk fluid distribution for supplying process fluids to semiconductor process tools. The improved system having an alternating pressure vessel engine substantially eliminates pressure fluctuations in the bulk fluid supply line due to head losses from the changing weight of the fluid in the dispensing vessels. The system also enables flexible control of the flow conditions of the fluid in the fluid supply line.
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Air Liquide Electronics U.S. LP
Hepperle Stephen
McQueeney Patricia E.
Price Craig
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