Control of electron bombardment of the exhaust oxygen sensor dur

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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204192S, 204192C, 204427, C23C 1500

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active

044002556

ABSTRACT:
A method of sputtering a platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor. High yields of sensors having fast response times as formed are consistently produced. The exhaust gas outer electrode is sputtered onto the thimble after first forming an inner electrode, using a rate that significantly heats the thimble. The first electrode is maintained electrically isolated from the exhaust electrode during sputtering, and is maintained at a different electrical potential.

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