Control of dissolved gas levels in deionized water

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...

Reexamination Certificate

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C134S021000, C134S036000, C134S184000, C134S902000

Reexamination Certificate

active

06997192

ABSTRACT:
An embodiment of the invention is an apparatus having a cleaning tank2, a megasonic energy source3, and an intake pipe6where a membrane contactor9is coupled to the intake pipe6to change the concentration of nitrogen gas in the deionized water8contained in intake pipe6to a range between 5.4% to 54% of saturation. Another embodiment is a method of changing the concentration of nitrogen gas in deionized water8to a range between 5.4% to 54% of saturation.

REFERENCES:
patent: 5800626 (1998-09-01), Cohen et al.
patent: 2003/0015216 (2003-01-01), Nicolosi et al.
Fred Wiesler, “Membranes, Membrane Contactors: An Introduction to the Technology” Ultrapure Water, pp. 27-31, May/Jun. 1996.

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