Abrading – Abrading process – Glass or stone abrading
Patent
1996-04-26
1998-09-01
Rose, Robert A.
Abrading
Abrading process
Glass or stone abrading
451 60, 451287, 451288, 451289, 451303, 451307, B24B 100
Patent
active
058002480
ABSTRACT:
A technique for controlling a polishing rate across a substrate surface when performing CMP, in order to obtain uniform polishing of the substrate surface. A support housing which underlies a polishing pad includes a plurality of openings for dispensing a pressurized fluid. The openings are arranged into a pre-configured pattern for dispensing the fluid to the underside of the pad opposite the substrate surface being polished. The openings are configured into a number of groupings, in which a separate channel is used for each grouping so that fluid pressure for each group of openings can be separately and independently controlled.
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Meyer Anthony S.
Pant Anil K.
Volodarsky Konstantin
Weldon David E.
Young Douglas W.
Nguyen George
Ontrak Systems Inc.
Rose Robert A.
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