Control methods for micromirror devices implemented with a...

Details Control methods for micromirror devices implemented with a... Control methods for micromirror devices implemented with a...

2011-03-15

2011-03-15

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224100, C359S199200

Reexamination Certificate

active

07907325

ABSTRACT:
A method for controlling a micromirror device including mirror elements each composed of a micromirror supported on a substrate by an elastic hinge, and a address electrode arranged across the deflection axis of the micromirror comprises deflecting the micromirror by changing a potential to a predetermined waveform for the address electrode.

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