Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-04-19
2011-04-19
Patel, Ramesh B (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S009000, C700S104000, C700S108000, C700S169000, C700S174000, C702S182000, C702S183000, C702S184000, C340S003100, C340S003430, C340S003900
Reexamination Certificate
active
07930049
ABSTRACT:
A centralized control apparatus includes a data collecting part that gathers data at a predetermined interval from a substrate processing apparatus for each component in the substrate processing apparatus; a data processing part that determines a status of each component based on the gathered data and regulation control information including attribute information about each component, maintenance information and previously established status-determined information about each component, at a predetermined timing established for each component, and performs thinning-out-processing to the gathered data on a determination result and prepares processed data by processing data obtained by the thinning-out-processing; and a data transmitting part that sends the regulation control information including the determination result and the processed data to a terminal unit.
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Hitachi Kokusai Electric Inc.
Oliff & Berridg,e PLC
Patel Ramesh B
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