Control circuitry for maintaining forward and reflected transmis

Details Control circuitry for maintaining forward and reflected transmis Control circuitry for maintaining forward and reflected transmis

1979-02-26

1981-09-01

Shoop, William M.

Electricity: power supply or regulation systems

Output level responsive

Using a three or more terminal semiconductive device as the...

323274, 323280, 330207P, 455117, G05F 166

Patent

active

042874661

ABSTRACT:
Circuitry for controlling the power output of an R.F. generator for regulating the forward power transmitted into a load of varying impedance, such as an R.F. sputtering target, and for limiting reflected power to a safe predetermined level. Forward power is controlled by circuitry that compares the voltage across the target with a predetermined reference voltage and the amplified output is applied to the signal generator control circuitry. Reflected power is measured by a sensor that outputs a proportional D.C. signal that is compared with a predetermined threshold voltage. Whenever the reflected power signal exceeds this threshold, it removes the effect of the target voltage input signal so that the amplified control signal to the R.F. generator is a function only of the reflected power.

REFERENCES:
patent: 3641451 (1972-02-01), Hollingsworth et al.
patent: 3852669 (1974-12-01), Bowman et al.
patent: 3939433 (1976-02-01), Okada et al.
patent: 3986100 (1976-10-01), Beierholm et al.
patent: 4122400 (1978-10-01), Medendorp et al.

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