Control apparatus for vertical vibration elimination table

Details Control apparatus for vertical vibration elimination table Control apparatus for vertical vibration elimination table

1994-06-09

1995-12-26

Foss, J. Franklin

Supports

With condition responsive control means

108136, 188378, F16M 1300

Patent

active

054780438

ABSTRACT:
A vertical vibration elimination table apparatus has a vibration elimination table supported by actuators at four portions thereof. The actuators are operable in response to signals which are fed back thereto and which are indicative of vertical positions and vertical accelerations of the four portions of the table. A control apparatus for controlling and driving the actuators includes a 4-degree-of-freedom motion mode extraction circuit for extracting motion mode error signals of four degrees of freedom including one degree of freedom for translational motion, two degrees of freedom for rotations and one degree of freedom for twist motion, a compensation circuit for producing compensated motion mode signals by effecting compensations on the respective motion mode error signals, and a motion mode distribution circuit for producing drive signals based on the compensated motion signals and delivering the drive signals to the respective actuators.

REFERENCES:
patent: 4483425 (1984-11-01), Newman
patent: 4730541 (1988-03-01), Greene
patent: 5060519 (1991-10-01), Chojitani
patent: 5251863 (1993-10-01), Gossman
patent: 5285995 (1994-02-01), Gonzalez
patent: 5327061 (1994-07-01), Gullapalli
patent: 5356110 (1994-10-01), Eddy
patent: 5374025 (1994-12-01), Whelpley
patent: 5379980 (1995-01-01), Houghton
patent: 5385217 (1995-01-01), Watanabe

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