Control apparatus for reducing adhesive force of adhesive agent

Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – With means applying wave energy or electrical energy...

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Details

1562722, 156344, 156382, 1563809, 2504921, B32B 3126

Patent

active

047189673

ABSTRACT:
The apparatus includes a treating container having a light transmission window and a closure member for opening and closing the container, a light source positioned opposite the light transmission window, and equipment for deoxygenating at least a substantial portion of the oxygen from the interior of the container. The container is charged with a semiconductor wafer adhered to a substantially light transparent substrate by a photo-setting adhesive agent. The agent is cured or hardened by irradiation by the light source thereby decreasing its adhesive force. A first cassette casing, a charging conveyor for removing untreated workpieces from the first cassette casing, a charging conveyor for removing untreated workpieces from the charging conveyor into the container can be provided at one side of the container. A discharging arm for removing the treated workpiece from the container, second cassette casing, and a discharging conveyor for transferring treated workpieces from the discharging arm to the second cassette casing can be provided on the other side of the container.

REFERENCES:
patent: 4436985 (1984-03-01), Weber
patent: 4656358 (1987-04-01), Divens et al.
patent: 4664739 (1987-05-01), Furichio

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