Control and moderation of aluminum in silicon using germanium an

Details Control and moderation of aluminum in silicon using germanium an Control and moderation of aluminum in silicon using germanium an

1992-04-15

1993-03-09

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 30, 437150, 437959, H01L 21266

Patent

active

051927128

ABSTRACT:
A process is disclosed for controlling the diffusion of aluminum in silicon for the fabrication of monolithic pn junction isolated integrated circuits. Germanium is incorporated into the silicon where isolation or p-well diffusion of aluminum is to occur. Aluminum diffusion is modified by the presence of the germanium so that channeling and out diffusion are controlled. The control is enhanced when boron is incorporated into the silicon along with the aluminum.

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