Control and detection circuitry for mass airflow sensors

Details Control and detection circuitry for mass airflow sensors Control and detection circuitry for mass airflow sensors

1987-12-23

1989-12-05

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320419, 7320426, G01F 168

Patent

active

048844438

ABSTRACT:
A mass airflow sensor is disclosed which uses a small, thin dielectric diaphragm providing good thermal isolation for thin-film heating and temperature sensing elements, resulting in high flow sensitivity and low current operation of the heating element. The dielectric diaphragm is bounded by a p-etch-stopped silicon rim. The mass airflow sensor includes a primary sensor circuit which maintains a heated primary temperature sensing element and an ambient air temperature sensing element at a constant temperature difference. A slave sensor circuit, which includes a plurality temperature sensing elements, monitors heat loss due to airflow at a particular location on the diaphragm and generates an output signal indicative of airflow which is independent of ambient air temperature.

REFERENCES:
patent: 3623364 (1971-11-01), Withrow
patent: 3992940 (1976-11-01), Platzer Jr.
patent: 4135396 (1979-01-01), Stante et al.
patent: 4244217 (1981-01-01), Ledbetter
patent: 4283944 (1981-08-01), Gruner et al.
patent: 4471647 (1984-09-01), Jerman et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4548077 (1985-10-01), van Putten
patent: 4566320 (1986-01-01), Bohrer
patent: 4587842 (1986-05-01), Handtmann
patent: 4596140 (1986-06-01), Dorman et al.
patent: 4624138 (1986-11-01), Ono et al.
patent: 4637253 (1987-01-01), Sekimura et al.
patent: 4672847 (1987-06-01), Uchiyama et al.
patent: 4680963 (1987-07-01), Tabata et al.
patent: 4733559 (1988-03-01), Tine et al.

Affiliated with

Also associated with

Rating

Control and detection circuitry for mass airflow sensors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Control and detection circuitry for mass airflow sensors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Control and detection circuitry for mass airflow sensors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2027274