Contrast enhancement layer compositions, alkylnitrones, and use

Details Contrast enhancement layer compositions, alkylnitrones, and use Contrast enhancement layer compositions, alkylnitrones, and use

1989-12-04

1991-03-26

Schofer, Joseph L.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Processes of preparing a desired or intentional composition...

564248, 564278, 568924, 568927, 568943, 430339, 524500, C08K 517

Patent

active

050029932

ABSTRACT:
Contrast enhancement compositions are provided which can be used to make contrast enhancement layer photoresist composites. The composites can be used to make patterned photoresists under mid-UV light and utilize photobleachable alkylnitrones.

REFERENCES:
patent: 3416922 (1968-12-01), Sus et al.
patent: 3511653 (1970-05-01), Wiebe
patent: 3917700 (1975-11-01), Auerbach
patent: 4276369 (1981-06-01), Tsuda et al.
patent: 4578344 (1986-03-01), Griffing et al.
patent: 4677049 (1987-06-01), Griffing et al.

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