Continuously variable analog micro-mirror device

Details Continuously variable analog micro-mirror device Continuously variable analog micro-mirror device

2005-01-18

2005-01-18

Sikder, Mohammad (Department: 2872)

Optical: systems and elements

Mirror

With support

C359S871000, C359S872000, C359S220100, C359S221200, C359S222100, C359S223100, C359S224200, C359S225100, C359S226200

Reexamination Certificate

active

06843576

ABSTRACT:
A micro-mirror device includes a substrate, a reflective element spaced from the surface of the substrate, a pair of electrodes disposed adjacent to the surface of the substrate, spaced apart from each other, and disposed adjacent to opposite ends of the reflective element, and including a dielectric liquid disposed at least between the reflective element and the pair of electrodes. The reflective element is adapted to be positioned at any position within a continuous range between a first position and a second position in response to analog electrical signals applied to the pair of electrodes.

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