Continuous vacuum processing apparatus

Details Continuous vacuum processing apparatus Continuous vacuum processing apparatus

1989-05-26

1992-04-07

Dayoan, D. Glenn

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

118719, B65G 0000

Patent

active

051022796

ABSTRACT:
A continuous vacuum processing apparatus has at least one preliminary vacuum chamber respectively disposed in front of and rear of a vacuum processing chamber. The preliminary vacuum chamber is provided with a slit-shaped seal for sealing the vacuum processing chamber from outside. The preliminary vacuum chamber which is located closest to the atmosphere is provided with an adjusting valve for adjusting the evacuation rate. Alternatively, the preliminary vacuum chamber which is located closest to the atmosphere is shorter that other preliminary vacuum chambers.

REFERENCES:
patent: 2384500 (1945-09-01), Stoll
patent: 3057792 (1962-10-01), Frohlich
patent: 3667626 (1972-06-01), Torelli et al.
patent: 4664951 (1987-05-01), Doehler
patent: 4693799 (1987-09-01), Yanagihara et al.
patent: 4797054 (1989-01-01), Arii

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