Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1996-12-04
1998-10-06
Langel, Wayne
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
C01B 21068
Patent
active
058172858
ABSTRACT:
Silicon nitride powder is continuously prepared by feeding metallic silicon powder into a fluidized bed comprising silicon nitride powder and nitrogen or ammonia gas and discharging a nitrided product from the fluidized bed. The metallic silicon powder is pretreated at a temperature of 1,000.degree.-1,400.degree. C. under a vacuum of 0.001-100 Torr before it is subject to nitriding reaction.
REFERENCES:
patent: 5232677 (1993-08-01), Fukuoka et al.
patent: 5344634 (1994-09-01), Edler
patent: 5456896 (1995-10-01), Fukuoka et al.
Fukuhira Masanori
Fukuoka Hirofumi
Konya Yoshiharu
Langel Wayne
Shin-Etsu Chemical Co. , Ltd.
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