Continuous cryopump with a method for removal of solidified gase

Details Continuous cryopump with a method for removal of solidified gase Continuous cryopump with a method for removal of solidified gase

1988-05-05

1989-06-13

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62100, 62268, 417901, B01D 800

Patent

active

048380350

ABSTRACT:
An improved cryopump for the removal of gases from a high vacuum, comprising a cryopanel incorporating honeycomb structure, refrigerant means thermally connected to the cryopanel, and a rotatable channel moving azimuthally around an axis located near the center of the cryopanel, removing gases absorbed within the honeycomb structure by subliming them and conducting them outside the vacuum vessel.

REFERENCES:
patent: 4339680 (1982-07-01), Flecher et al.
patent: 4449373 (1984-05-01), Peterson et al.
patent: 4475349 (1984-10-01), Batzer et al.
patent: 4506513 (1985-03-01), Max
patent: 4530250 (1985-07-01), Gay et al.
patent: 4559787 (1985-12-01), Batzer et al.
patent: 4724677 (1988-02-01), Foster
Foster, C. A., "High-Throughput Continuous Cryopump", J. Vac. Sci. Tech., A5(4), Jul./Aug. 1987.

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