Continuous coating system

Details Continuous coating system Continuous coating system

2005-09-27

2005-09-27

Versteeg, Steven (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298250, C118S718000

Reexamination Certificate

active

06949173

ABSTRACT:
A continuous coating system has several treatment chambers (1, 2) that are arranged one after the other in such a way that in each case, a wall (3) of one treatment chamber (1) having a passage (5) contacts a wall (4) in the adjacent treatment chamber (2) that also has a passage (6). One of the passages (5) is provided in a sealing insert (7), which supports itself on the same side with a first support surface (9) on the wall (3) of one treatment chamber (1) and with a second support surface (10) against the wall (4) of the adjacent treatment chamber (2). Between the two support surfaces (9, 10) and the respective walls (3, 4), in each case there is a surrounding gasket (13, 14) against the respective support surface (9, 10) and the wall (3, 4).

REFERENCES:
patent: 4795299 (1989-01-01), Boys et al.
patent: 5110249 (1992-05-01), Norman
patent: 5135635 (1992-08-01), Ikeda
patent: 6302372 (2001-10-01), Sauer et al.

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